Effect of Ta doping on the properties of beta-Ga2O3 heteroepitaxial films prepared on KTaO3(100) substrates
Release Time:2021-05-28
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- Institution:
- 集成电路学院
- Title of Paper:
- Effect of Ta doping on the properties of beta-Ga2O3 heteroepitaxial films prepared on KTaO3(100) substrates
- Journal:
- Journal of Materials Science: Materials in Electronics
- First Author:
- 王迪
- Document Code:
- B219DC80D7834A9FA49D4957ED10C84F
- Volume:
- 32
- Issue:
- 3
- Page Number:
- 2757
- Number of Words:
- 5
- Translation or Not:
- No
- Date of Publication:
- 2021-02
- Release Time:
- 2021-05-28