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一种制备均匀薄膜的复合涂布装置及方法
Release Time:2021-11-15
  • Institution:
    机械工程学院
  • Type of Patent:
    Invent
  • Application Number:
    202011382674.4
  • Number of Inventors:
    5
  • Service Invention or Not:
    No
  • Application Date:
    2020-12-01
  • Publication Date:
    2022-04-12
  • Authorization Date:
    2022-04-12
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