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集成电路溅射靶材关键制备技术研发（子课题1）
Release Time:2024-04-30
  • Institution:
    材料科学与工程学院
  • Leading Scientist:
    赵国庆
  • Nature of Project:
    纵向
  • Project Number:
    123FD8D75712705DE063BE07C2CA8D63
  • Project Approval Number:
    2023CXGC010308-2
  • Date of Project Approval:
    2023-10-07
  • Scheduled Completion Time:
    2026-06-30
  • Date of Project Completion:
    2026-06-30
  • Date of Project Initiation:
    2023-07-01
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