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Project Name:光栅波导片高精度叠合结构设计

Institution:机械工程学院

Leading Scientist:屈硕硕

Nature of Project:横向

Project Number:853B050E0618403FBDFD4222F70CCADF

Date of Project Approval:2021-12-30

Scheduled Completion Time:2023-01-31

Date of Project Completion:2023-01-31

Date of Project Initiation:2021-12-30

Release Time:2022-05-27