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    Development of a Novel Pile-up Structure based Nanopositioning Mechanism Driven by Piezoelectric Actuator

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    • Institution:海洋研究院

    • Title of Paper:Development of a Novel Pile-up Structure based Nanopositioning Mechanism Driven by Piezoelectric Actuator

    • Journal:IEEE/ASME TRANSACTIONS ON MECHATRONICS

    • First Author:Xu Yang

    • Document Code:A6722D30FF784E909BC0A8D4172B2223

    • Volume:Vol. 25

    • Issue:NO.2

    • Page Number:502

    • Translation or Not:No

    • Date of Publication:2020-04

    • Release Time:2020-06-07
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