Paper Publications
Effect of nitrogen doping concentration on 4H-SiC laser slicing
Release Time:2025-05-24
  • Institution:
    新一代半导体材料研究院
  • Journal:
    Journal of the American Ceramic Society
  • First Author:
    陈秋
  • Document Code:
    F446042385FF456791A778937BB905AA
  • Issue:
    e20555
  • Number of Words:
    3
  • Translation or Not:
    No
  • Date of Publication:
    2025-04
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