Title:一种便携式中红外高灵敏度多组分气体测量分析系统及其工作方法
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202010324577.3
Number of Inventors:4
Service Invention or Not:No
Application Date:2020-04-23
Publication Date:2021-04-16
Authorization Date:2021-04-16
Release Time:2021-10-22