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Heteroepitaxial growth of the δ-Ta2O5 films on a-Al2O3(0001)
Release Time:2022-12-17
  • Institution:
    集成电路学院
  • Journal:
    Journal of Materials Science-Materials in Electronics
  • First Author:
    马瑾
  • Document Code:
    82B66AFBC45F46DE928D3AE918047B0B
  • Issue:
    33
  • Number of Words:
    4
  • Translation or Not:
    No
  • Date of Publication:
    2022-01
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