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Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD
Release Time:2022-12-17
  • Institution:
    集成电路学院
  • Journal:
    Ceramics International
  • First Author:
    马瑾
  • Document Code:
    FC05275B00DC4305A1EC798416E4AF56
  • Issue:
    48
  • Page Number:
    26800
  • Number of Words:
    5
  • Translation or Not:
    No
  • Date of Publication:
    2022-06
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