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Synthesis and characterization of single-crystalline delta-Ta2O5 epitaxial films on Y-stabilized ZrO2 (111) substrates
Release Time:2021-05-28
  • Institution:
    集成电路学院
  • Journal:
    Ceramics International
  • First Author:
    乐永
  • Document Code:
    6116E1F3B7E64F9D9EA9BB812731DEF9
  • Volume:
    47
  • Issue:
    4
  • Page Number:
    5510
  • Number of Words:
    4600
  • Translation or Not:
    No
  • Date of Publication:
    2021-02
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