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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
Release Time:2020-03-20
  • Institution:
    集成电路学院
  • Journal:
    Journal of ELECTRONIC MATERIALS
  • First Author:
    杨小坤
  • All the Authors:
    肖洪地,马瑾,Jianqiang Liu,栾彩娜,毛宏志
  • Document Code:
    9600585BF2564969BC16220CA429D8C2
  • Volume:
    48
  • Issue:
    5
  • Page Number:
    3036
  • Number of Words:
    3
  • Translation or Not:
    No
  • Date of Publication:
    2019-05
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