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Depth detection and fabrication of porous silicon without the stress
Release Time:2019-10-25
  • Institution:
    集成电路学院
  • Journal:
    Applied Surface Science
  • First Author:
    曹得重
  • All the Authors:
    刘向东,马瑾,肖洪地,Helen
  • Document Code:
    lw-198329
  • Volume:
    362
  • Page Number:
    557
  • Translation or Not:
    No
  • Date of Publication:
    2016-02
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