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Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
Release Time:2019-06-06
  • Institution:
    微电子学院
  • Journal:
    Journal of Electronic Materials
  • First Author:
    肖洪地
  • All the Authors:
    毛宏志,栾彩娜,Jianqiang Liu,马瑾
  • Document Code:
    DBE67F01DB544898847C76A91BEC549C
  • Volume:
    48
  • Page Number:
    3036
  • Translation or Not:
    No
  • Date of Publication:
    2019-02
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