Research Projects
超临界二氧化碳微乳液在半导体纳米器件清洗技术中的应用
Release Time:2019-04-18
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Institution:
物理学院
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Leading Scientist:
Li Yuxiang
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Supported by:
08攻关三批
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Nature of Project:
纵向
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Project Level:
省、部委级
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Project Participants:
Li Yuxiang,Li Yuxiang,肖洪地,Jianqiang Liu,赵丽丽
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Project Number:
kyxm-3514
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Project Approval Number:
8GG3003007
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Date of Project Approval:
2008-01-01
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Scheduled Completion Time:
2010-12-31
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Date of Project Completion:
2010-12-31
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Date of Project Initiation:
2008-01-01
