Title:一种基于周期性结构的人工表面等离激元的微流控检测芯片结构及其制备、检测方法
Institution:集成电路学院
Type of Patent:Invent
Application Number:202110298786.X
Number of Inventors:3
Service Invention or Not:No
Application Date:2021-03-20
Publication Date:2022-11-08
Authorization Date:2022-11-08
Release Time:2022-11-15