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一种减少蒸发镀膜设备中衬底或其上的材料受烘烤升温影响的装置及应用

Release Time:2019-04-15 Hits:

Title:一种减少蒸发镀膜设备中衬底或其上的材料受烘烤升温影响的装置及应用
Institution:物理学院
Type of Patent:发明
Application Number:2015110256428
Number of Inventors:2
Service Invention or Not:No
Application Date:2015-12-30
Release Time:2019-04-15

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