Project Name:高效精准可控的半导体膜状扩散源研发及产业化
Institution:集成电路学院
Leading Scientist:王卿璞
Nature of Project:纵向
Project Level:省、部委级
Project Number:EFB1C2B9EFA95D60E053BE07C2CA55BE
Project Approval Number:2022TSGC1093
Date of Project Approval:2022-08-01
Scheduled Completion Time:2024-07-31
Date of Project Completion:2024-07-31
Date of Project Initiation:2022-08-01
Release Time:2024-04-16