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The properties of ion-implanted LiNbO3 waveguides measured by the RBS and ion beam etching stripping methods
Release Time:2022-10-21
  • Institution:
    前沿交叉科学青岛研究院
  • Journal:
    OPTICAL MATERIALS
  • Key Words:
    Ion implantation;Damage profile;LiNbO3;RBS
  • First Author:
    赵金花
  • Document Code:
    1395252892088143873
  • Volume:
    33
  • Issue:
    8
  • Page Number:
    1357-1361
  • Translation or Not:
    No
  • Date of Publication:
    2011-06
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