Heteroepitaxial growth of the δ-Ta2O5 films on a-Al2O3(0001)
Release Time:2022-12-17
Hits:
- Institution:
- 集成电路学院
- Title of Paper:
- Heteroepitaxial growth of the δ-Ta2O5 films on a-Al2O3(0001)
- Journal:
- Journal of Materials Science-Materials in Electronics
- First Author:
- 马瑾
- Document Code:
- 82B66AFBC45F46DE928D3AE918047B0B
- Issue:
- 33
- Number of Words:
- 4
- Translation or Not:
- No
- Date of Publication:
- 2022-01
- Release Time:
- 2022-12-17