Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD
Release Time:2022-12-17
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- Institution:
- 集成电路学院
- Title of Paper:
- Heteroepitaxial growth of the orthorhombic Ta2O5 single-crystalline films on epi-GaN/α-Al2O3 (0001) substrates by MOCVD
- Journal:
- Ceramics International
- First Author:
- 马瑾
- Document Code:
- FC05275B00DC4305A1EC798416E4AF56
- Issue:
- 48
- Page Number:
- 26800
- Number of Words:
- 5
- Translation or Not:
- No
- Date of Publication:
- 2022-06
- Release Time:
- 2022-12-17