Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
Release Time:2019-10-25
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- Institution:
- 集成电路学院
- Title of Paper:
- Lift-Off Mechanism of GaN Thin Films with Buried Nanocavities Investigated by SEM and TEM
- Journal:
- Journal of Electronic Materials
- First Author:
- 肖洪地
- All the Authors:
- 马瑾,毛宏志,栾彩娜,Jianqiang Liu,肖洪地
- Document Code:
- DBE67F01DB544898847C76A91BEC549C
- Volume:
- 48
- Page Number:
- 3036
- Translation or Not:
- No
- Date of Publication:
- 2019-02
- Release Time:
- 2019-10-25