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Structure and Optical Properties of Epitaxial Indium Oxide Films Deposited on Y-Stabilized ZrO2 (111) by MOCVD

Release Time:2019-10-22
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Institution:
微电子学院
Title of Paper:
Structure and Optical Properties of Epitaxial Indium Oxide Films Deposited on Y-Stabilized ZrO2 (111) by MOCVD
Journal:
Journal of ELECTRONIC MATERIALS
First Author:
马瑾
All the Authors:
栾彩娜,冯先进
Document Code:
lw-171209
Translation or Not:
No
Date of Publication:
2015-08
Release Time:
2019-10-22