Preparation and characterization of Al2xIn22xO3 films deposited on MgO (10 0) by MOCVD
Release Time:2019-06-06
Hits:
- Institution:
- 微电子学院
- Title of Paper:
- Preparation and characterization of Al2xIn22xO3 films deposited on MgO (10 0) by MOCVD
- Journal:
- Materials Research Bulletin
- First Author:
- 马瑾
- All the Authors:
- 栾彩娜,冯先进
- Document Code:
- lw-171206
- Translation or Not:
- No
- Date of Publication:
- 2015-07
- Release Time:
- 2019-06-06