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Structural, electrical and optical properties of epitaxial Ta-doped titania films by MOCVD

Release Time:2019-04-14
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Institution:
微电子学院
Title of Paper:
Structural, electrical and optical properties of epitaxial Ta-doped titania films by MOCVD
Journal:
CrystEngComm
First Author:
赵伟
All the Authors:
冯先进,栾彩娜,马瑾
Document Code:
1BAB2A7410104D86A2C9EE6A7D938788
Volume:
20
Issue:
36
Page Number:
5395
Translation or Not:
No
Date of Publication:
2018-09
Release Time:
2019-04-14