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Characterization of niobium-doped titania epitaxial films deposited by metalorganic chemical vapor deposition

Release Time:2019-04-14
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Institution:
微电子学院
Title of Paper:
Characterization of niobium-doped titania epitaxial films deposited by metalorganic chemical vapor deposition
Journal:
Materials Characterization
First Author:
赵伟
All the Authors:
栾彩娜,冯先进,马瑾
Document Code:
E7360D1206B144FE88640BC852023BC7
Volume:
137
Page Number:
263
Translation or Not:
No
Date of Publication:
2018-03
Release Time:
2019-04-14