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所属单位：机械工程学院
论文名称：Intelligent identification of material removal behavior during scratching of 4H-SiC based on acoustic emission sensing and unsupervised deep learning
发表刊物：Materials Science in Semiconductor Processing
第一作者：张瑞豪
论文编号：949D5A5A5FEA406C8F6DFA8DDCBE2689
卷号：190
期号：1
页面范围：109358
字数：4
是否译文：否
发表时间：2025-05
发布时间：2025-10-06
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